The manual introduces Yidu Intelligence's gas laminar flow mass flow controllers and meters, detailing features, technical parameters, and application…
Yidu Intelligence offers a family of gas laminar‑flow mass flow controllers (MFC) and meters (MFM) covering a wide range of flow rates, pressures, and temperatures. The series includes S100, M100, MC200, SC100 and many specialized variants such as high‑pressure, low‑pressure‑drop, vacuum‑type, and portable models, each featuring touch‑screen operation, multiple communication options, and built‑in temperature and pressure compensation.
The products are designed for laboratory and industrial use in semiconductor, biopharma, new‑material and energy sectors. They provide high repeatability (±0.2% FS), fast response (as low as 20 ms for QR series), and robust construction for extreme temperature ranges (‑50 °C ~ 115 °C) and pressures up to 2 MPa. Optional OEM solutions and a dedicated display hub (MGY‑Point6) enable multi‑device networking and centralized control. This manual is written in Chinese.
| Measurement range | 0.1 SCCM ~ 5000 SLPM |
|---|---|
| Reading accuracy | ±0.5% ~ 1% FS |
| Temperature operating range | -50 °C ~ 115 °C |
| Pressure operating range | ≤2 MPa |
| Response time (MC200 series) | < 300 ms |
| Full‑scale pressure drop (low‑pressure‑drop series) | ≤400 Pa ~ 2 kPa |
| Communication interfaces | 4‑20 mA, 0‑5 V analog; RS485 digital |
| Power supply (display hub) | 24 VDC, max 5 A |
| Dimensions (display hub) | 167.5 × 85 × 30 mm |
| Weight (display hub) | 0.3 kg |
The S100 series can measure flow from 0.1 SCCM up to 5000 SLPM.
They operate from –50 °C to 115 °C.
Both analog (4‑20 mA, 0‑5 V) and digital RS485 interfaces are supported.
The QR series achieves a response time of about 20 ms.