User manual for the Shanghai MorningTech XDM crystal thin film deposition controller, covering specs, installation, operation and troubleshooting.
The XDM crystal thin film deposition controller from Shanghai MorningTech is designed for optical thin‑film vacuum deposition processes, providing real‑time thickness and rate control. The manual introduces the instrument, its technical specifications, hardware installation, configuration, operation, communication protocols and troubleshooting.
It details the hardware interfaces, input/output options, power requirements and optional features such as multi‑layer thickness calculation and PID rate control, helping users set up and maintain the system efficiently. This manual is written in Chinese.
| Sensor frequency | 6 MHz (usable to 5 MHz) |
|---|---|
| Frequency resolution | 0.005 Hz |
| Thickness resolution | 0.1 Å |
| Thickness accuracy | ±0.5 % |
| Sampling period | 100 ms |
| Voltage control range | 0–10 V |
| Voltage resolution | 16 bits |
| Input channels | 8 LVTTL |
| Output relays | 10 SPST‑NO, 2 A, 30 V DC/250 V AC |
| Communication interface | RS232C, 9600 or 115200 bps |
| Power input | 100 V / 220 V AC, 50–60 Hz |
| Maximum power consumption | 30 VA |
| Fuse rating | 0.5 A, Ф5 × 20 mm |
| Operating temperature | 0 °C to 50 °C |
| Dimensions (XDM2) | 300 mm × 203 mm × 8 mm |
| Weight (XDM2) | ≈2.5 kg |
| Dimensions (XDM3) | Standard 2U rack width, 88 mm height, 300 mm depth |
The sensor provides a frequency resolution of 0.005 Hz.
It has 8 LVTTL input channels compatible with TTL levels.
The controller includes one RS232C port with selectable baud rates of 9600 or 115200 bps.