Operating instructions for Leybold TURBOVAC 90, 250, 350 and 450 i(X) turbomolecular pumps, covering safety, installation, operation, maintenance and…
The Leybold TURBOVAC series (90 i(X), 250 i(X), 350 i(X) and 450 i(X)) are turbomolecular pumps designed to evacuate vacuum chambers to high‑vacuum and ultra‑high‑vacuum levels. They require a fore‑vacuum pump and a power supply and are suitable for air and clean gases.
The manual provides important safety information, installation steps, wiring and interface details, operating procedures, routine maintenance, and troubleshooting guidance. It also includes technical data, ordering information, and regulatory certificates.
| Maximum permissible fore‑vacuum pressure (N₂) | 14 mbar |
|---|---|
| Operating speed | 172 000 min⁻¹ |
| Maximum power consumption | 240 W |
| Type of protection | IP 40 |
The pressure in the pump must not exceed 1.4 bar absolute.
The rotor should be replaced after 80 000 operating hours at the latest.