Hexamethyldisilazane (HMDS) Material Safety Data Sheet

The MSDS provides hazard, handling, storage, and emergency information for hexamethyldisilazane (HMDS).

Hexamethyldisilazane (HMDS) Material Safety Data Sheet - cover page
Category
Chemical products
Document type
Datasheet
Language
English
Pages
6
File format
PDF
File size
134 KB
Published
01 October, 2026
Updated
01 October, 2026
MD5 checksum
42B0951AF997D8A992FD51F4AE0ED5E6
PDF
Hexamethyldisilazane (HMDS) Material Safety Data Sheet PDF

About this manual

This Material Safety Data Sheet (MSDS) details the composition, physical and chemical properties, and regulatory information for hexamethyldisilazane (HMDS). It includes hazard classifications, first‑aid measures, fire‑fighting instructions, and recommended personal protective equipment.

The document also outlines safe handling, storage requirements, exposure controls, disposal considerations, and transport information, helping users manage the chemical safely in laboratory or industrial settings.

What's inside

  • Product Identification
  • Hazards Identification
  • First Aid Measures
  • Fire Fighting Measures
  • Handling and Storage
  • Physical and Chemical Properties
  • Stability and Reactivity
  • Toxicological Information
  • Transport Information

Specifications

Molecular Weight161.39
Chemical Formula(CH3)3SiNHSi(CH3)3
CAS Number999-97-3
Boiling Point125°C (257°F)
Flash Point11°C (52°F)

Frequently asked questions

What personal protective equipment is required when handling HMDS?

Use goggles or a face shield, a lab coat and apron, a vent hood, and appropriate gloves.

What first‑aid steps should be taken for skin contact with HMDS?

Immediately wash the exposed area with soap and water and seek medical advice if irritation develops.

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