This manual provides installation, operation, and maintenance instructions for the Brooks Model 5850i Mass Flow Controller, covering specifications, wiring…
The Brooks Model 5850i Mass Flow Controller is a device designed for accurately measuring and rapidly controlling flows of gases. It consists of a flow sensor, a control valve, and an integral electronic control system, featuring standard capabilities such as fast response control, soft start, and valve override. The controller is widely used in industries including semiconductor manufacturing, biopharmaceuticals, and analytical instrumentation.
| Standard Ranges | 3 sccm to slpm* (nitrogen equivalent) |
|---|---|
| Accuracy | ±1% full scale including linearity at calibrated conditions |
| Repeatability | 0.25% of rate |
| Response Time | Less than 6 seconds to within 2% of full scale final value |
| Power Requirements | +15 to +28 Vdc |
| Working Pressure | 1500 psi (10.342 MPa) maximum |
| Output Signal | 0-5 Vdc into 2,000 ohms or greater |
| Electrical Connections | D-type, 15-pin connector (DA-15P) |
The response time is less than 6 seconds to within 2% of the full scale final value with a 0 to 100% command step.
The unit requires +15 to +28 Vdc, drawing 245 mA at +15 Vdc up to 370 mA at +28 Vdc.
The maximum working pressure is 1500 psi (10.342 MPa).
The device uses a D-type, 15-pin connector (DA-15P).