ULTRA HIGH PURITY DIAPHRAGM VALVES VCD Series

VCD series valves feature a compact design with minimal dead space. Body materials comply with SEMI F-20 standard for ultra high purity semiconductor manufacturing applications. VCD series valves offer maximum flow capacity, minimal particle generation, minimal contribution of moisture, oxygen and hydrocarbon, and excellent surface finish.


File format
PDF
Published
24 November, 2023
Updated
24 November, 2023
MD5 checksum
BF4BED3A0082E44315017F2118B45667
Download PDF

Also Manuals