Flexus thin film stress measurement (flexus-380)

The document describes the use of Tencor FLX-2320 thin film stress measurement instrument, including the steps of measuring thin film stress and setting up a measuring program.

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Published
18 October, 2023
Updated
18 October, 2023
MD5 checksum
42ED2BA77CA12999ABF11F669A576EF3
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Flexus thin film stress measurement (flexus-380) PDF
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