Update: 30 September, 2023
The Turbo-V 3K-G system is an advanced solution for thin film applications. It is the only truly "integrated" system in the market, with a fully integrated system with on-board power supply, vent/purge valves control capability, integrated diagnostics, and multiple interface capability. The system also has the lowest power absorption thermal efficiency, new double loop SST cooling channel, reduced power consumption, reduced bearing operating temperature, and oil-free, robust and reliable design. It is the best turbo solution for thin film deposition with the best footprint to performance ratio.
File format: PDF
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MD5 Checksum: 34AFC8F6A581776209E1AF51FC87F90A
Publication date: 03 July, 2012
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PDF Link: Agilent The Turbo-V 3K-G System An Advanced Solution for Thin Film Applications Manual PDF