Agilent Technologies Analysis of Impurities in Semiconductor Grade TMAH using the Agilent 7500cs ICP-MS

Update: 01 October, 2023

This application note demonstrates the suitability of a newly developed, high sensitivity reaction cell inductively coupled plasma mass spectrometer (ICP-MS) for the deter- mination of inorganic impurities in semiconductor-grade tetramethyl ammonium hydroxide (TMAH).

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MD5 Checksum: B266A94B62CA8BD5ED417CD2CA2E6930

Publication date: 02 July, 2012

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PDF Link: Agilent Technologies Analysis of Impurities in Semiconductor Grade TMAH using the Agilent 7500cs ICP-MS PDF