Update: 30 September, 2023
This document introduces Agilent Technologies' Scanning Microwave Microscope (SMM), a new Scanning Probe Microscope (SPM) that combines the electromagnetic measurement capabilities of a microwave Vector Network Analyzer (VNA) with the nanometer-resolution and Angstrom-scale positioning capabilities of an Atomic Force Microscope (AFM). Agilent VNAs are mature, highly sophisticated characterization instruments that make extremely accurate, calibrated measurements of complex-valued ratios on electromagnetic signals. This measurement capability, delivered to the apex of an AFM tip makes the SMM the only SPM in its class, enabling calibrated, traceable measurements of electrical properties such as impedance and capacitance, with the high spatial resolution.
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MD5 Checksum: 553F52E491416A5EA1E38A7122F7990A
Publication date: 02 July, 2012
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PDF Link: Agilent Scanning Microwave Microscopy Manual PDF