KLA-Tencor Alpha-step Operating Manual

Update: 29 September, 2023

Alpha-Step IQ is a computerized and highly sensitive surface profiler that can measure roughness, waviness, and step height, with a wide range of applications.


File format: PDF

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MD5 Checksum: 859D4BB982A82E716AE3BF8B42BDBCD8

Publication date: 13 March, 2012

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PDF Link: KLA-Tencor Alpha-step Operating Manual PDF

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