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- Manuals
- 2
- Categories
- 1
- Languages
- EN
- Last added
- 2026-09-29
Featured MKS manuals

MKS 651C Pressure Controller Operating Manual
This manual covers safety information, unpacking, installation, and system setup for the MKS 651C pressure controller, including wiring, RS‑232 configuration, and valve selection. It also details environmental requirements and warranty information.
The guide explains local and remote operation, sensor calibration, analog and digital set points, battery‑backed memory, maintenance procedures, and includes full product specifications and command reference tables.
Covers: Safety Information · Installation · System Setup · Local Operation · Remote Operation · Maintenance

MKS CT150 User Manual
The MKS CT150 is a controller that communicates via an RS‑232 interface. It uses a 9‑pin D‑SUB male connector and supports a baud rate of 9600 with 7 data bits, even parity, and 1 stop bit.
The manual lists the controller's registers, error counters, and command set, including jog trim adjustments, start/stop control, and EEPROM storage functions. Each register is identified by its address and purpose, enabling configuration and monitoring of the device.
Covers: RS‑232 Communication Settings · Connector Type · Register Map · Error Counters · Jog Trim Commands · Start/Stop Command
Latest MKS manuals
MKS 651C Pressure Controller Operating Manual
User Manual 160 pages · 685 KB · ENThe MKS 651C Pressure Controller Operating Manual provides safety, installation, setup, and operation instructions for the controller.
MKS CT150 User Manual
User Manual 2 pages · 108 KB · ENThe MKS CT150 User Manual provides details on RS‑232 communication settings, register map, and operation commands for the controller.
Which document do I need?
User Manual
Day-to-day operation, settings and troubleshooting. Start here if the product is already set up.
Questions answered in MKS manuals
What is the warranty period for the MKS 651C Pressure Controller?
MKS warrants the equipment for one year from the date of shipment.
How can I change the line voltage on the controller?
Refer to the “How To Change the Line Voltage” section in Chapter Two for the procedure.
What are the RS‑232 communication parameters for the MKS CT150?
The controller uses a baud rate of 9600, 7 data bits, even parity, and 1 stop bit.
From: MKS CT150 User Manual
How can the controller be started or stopped?
Use the START_STOP command to start or stop the controller.
From: MKS CT150 User Manual
